ACS 16-20 missing data "(X") in what should be robust fields

For Cook COunty Illinois (average tract household size 1,495) entire fields are "(X)"

For example DP02_0003E  Estimate HOUSEHOLDS BY TYPE Total households Married-couple household With children of the householder under 18 years

and    DP02_0011E   Estimate HOUSEHOLDS BY TYPE Total households Female householder, no spouse/partner present With children of the householder under 18 years